Eigenphase Technologies

EigenPhase Technologies is a company that fabricates prototype devices and custom scientific instrumentation. The company works with numerous resist systems and does lithography of all types, including contact, stepper, and electron beam. In addition, it does wet chemical etching and reactive ion etching of all different materials using etch chemistries. EigenPhase uses silicon, silicon carbide, fused silica, quartz, sapphire, germanium, gallium arsenide, lithium niobate, lithium tantalate, and aluminum nitride among others. The company provides coatings and depositions of all types including LPCVD, PECVD, atomic layer deposition, thermal oxidation, evaporation, sputter deposition, spraycoat deposition, molecular vapor deposition, etc.